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Ten Sources Multi-process Evaporation Deposition System (PVD10)

he PVD10 is a modular cost efficient Physical Vapor Deposition system with a D-shaped chamber. It is dedicated to the thermal evaporation of materials: Thermal, Organic or E-Beam . The fully automated solution is ideal for small batch production in an R&D Environment. It also exists in hybrid configuration in association with sputtering deposition.

THERMAL/ORGANIC EVAPORATION

  • Evaporation by Joule effect
  • Up to 10 metallic or organic evaporation sources
  • Cross contamination shields included
  • Organic 2cc/Inorganic

 

E-BEAM EVAPORATION

    • Electron beam bombardment
    • 4x 6cc HV source
    • Multiple rotatable crucibles

    PVD10

    VINCI SPUTTERING SYSTEM PVD10