GEOPHYSIC TOOLS EXPLORATION & PRODUCTION PILOTS PLANTS & LABORATORY EQUIPMENT
MECA 2000
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Electron Beam Evaporator (PVD20-EB)

The PVD20 is a modular cost efficient Physical Vapor Deposition system with a D-shaped chamber. It is dedicated to the thermal evaporation of materials: Thermal, Organic or E-Beam . The fully automated solution is ideal for small batch production in an R&D Environment.
The PVD20-EB is equipped with a E-gun with 8 x 8cc rotable crucibles and a loadlock.
 
MAIN SPECIFICATIONS

  • Vacuum limit : 10-7 mbar range or better
  •  Substrate diameter : up to 6 inches
  •  8x8 cc electron beam source (Ti, Au, Ag, Al, Cr, W, Pt)
  •  1 x secured cryopumping group (short pumping cycles)
  •  Gas panel for Ar
  •  Rotating and water cooled substrate holder
  •  Full access front door for easy maintenance
  •  Load-lock chamber with RF plasma pre-cleaning
  •  Accurate control of the deposition rates
  •  Complete supervision of the system with management of pumping, venting, making of complex recipes...
PV20-EB with Loadlock and etching station
 
E-Beam evaporator


Quick video how to transfer from loadlock to chamber

 
Quick exchange oh HV desposition stage