GEOPHYSIC TOOLS EXPLORATION & PRODUCTION PILOTS PLANTS & LABORATORY EQUIPMENT
MECA 2000
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Electron Beam Evaporator (PVD4-EB)

The PVD4 is a modular cost efficient Physical Vapor Deposition system. It is dedicated to the E-Beam thermal evaporation of materials.The PVD4-EB ,a fully automated  and operator secured solution, is ideal for R&D Environment.
The PVD4-EB is equipped with a E-gun with 4 x 4cc rotatable crucibles.
 
MAIN SPECIFICATIONS

  • 4x4 cc electron beam source (metals) with 3KW Power supply
  •  Motorized crcuble and beam controller (GENIUS II)
  •  1 x secured tubopumping group (short pumping cycles)
  •    Vaccuum limit: 10-7 mbar range or better
  •    Substrate diameter : up to 4 inches
  •    Rotating and water cooled substrate holder (for Lift-Off)
  •    Rotating and heating substrate holder
  •  Dedicated top viewport for accurate beam control
  • Accurate control of the deposition rates
  •  Complete supervision of the system with management of pumping, venting, making of complex recipes...
PV4-EB
 
PVD4 EB