PLD 350-Six targets Pulsed Laser Deposition System

Click to download the datasheet 3 - PLD 350.pdf


Synthesis of complex materials & crystalline structures is a constant growing request from the research. Pulsed Laser Deposition (PLD) is one answer. It is a versatile coating technique that allows the growth of various materials as nitrides, oxides, superlattices, polymers, composites… From a comprehensive experience and know how in R&D deposition system and ultra high vacuum technology, Vinci Technologies has designed a Laser-MBE system, easy to operate, dedicated to academic & industrial researchers. Flexible and evolving, this pulsed laser deposition system allows coatings on substrates up to 2”. A large field of parameters can be explored like pressure, distance between target and substrate. This flexibility gives to the operator the possibility for depositing a multitude of thin film structures. Dedicated software was developed to get a full supervision of the system. In addition to the performances of the PLD-350 system, it provides high quality and reproducible processes to users.


* Transferable 2-inch substrate holder
* Ports for in-situ characterisations
* Reactive or UHV Pulsed Laser Deposition capability
* 4-axis target holder (6 targets of 1 inch)
* Turbomolecular pumping system
* Optional load lock chamber
* Ion gun cleaning
* Off-axis sputtering deposition